Glass Through-hole Processing

High quality and precise glass through-hole

Special Features

Free of microcracks, chipping, induced stress or etc.

Smooth inside walls of microholes

Ultra-dense microholes

Miniaturization and integration of devices

Technical Superiority

Superiority of Ebinax’s Process

Ebinax offers ultra-dense microholes with high quality.

  Ebinax’s Process Laser Shot Blast
Diameter of microhole(<100μm)      
Microcracks, Chipping      
Roughness of inside walls      

Good    Average    Poor

High-quality through-hole processing

Ebinax’s process makes ultra-dense microholes without microcracks or chipping.

Smooth inside walls of microholes

The inside walls of our microholes have a roughness of Ra≦0.08 μm.

Design Specs

Standard design

Size in 4 × 4, 6 × 6
Thickness (A)μm 200-500
Via’s Top Diameter (B)μm 30-100 ±5
Via’s Mid Diameter (C) B/2+
Via’s Pitch (D) 2 × B
Aspect Ratio (=B:A) 1:10 (approx.)
Via’s Positional Accuracy μm ±5
Through-Glass Via Shapes Straight ・ Hourglass ・ Tapered

Through-glass via cross-section

Substrate Materials

Alkali-free glass

These dimensions are for example only. Please contact us with your exact specifications.

Plating Examples

Conformal Plating

Through-hole Filling

Application Examples

Purpose Application Field
Electricity Sensor
Semiconductor package substrate
Testing equipment
Medical, Biotechnology,Telecommunications,Electric Appliance, Electronics, Industrial equipment, Semiconductor
Liquid Micro nozzle
Ink jet head part
Testing equipment
Medical, Electronics, Industrial equipment
Light Shielding plate
Micro filter
Electron beam aperture
Precision shielding plate
Testing equipment
Medical, Biotechnology,Electronics, Industrial equipment, Semiconductor

Production Flow Chart

Ebinax has an integrated production system from material procurement to dicing glass substrate.

  • Discussing / Order
  • Material procurement
  • Glass through-hole processing
  • Plating (electrode formation)
  • Polishing/Dicing
  • Delivery

※ Please contact us with your request.

Ebinax’s process leads to lower management costs and shorter lead times.

Please contact us if you have any questions.

[TEL] +81-3-3742-0107  [FAX] +81-3-3745-5476